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[1] Baker, ., Plass, ., Headley, . and Walraven, ., "Final Report: Compliant Thermo-Mechanical MEMS Actuators LDRD #52553," Sandia Report SAND2004-6635, printed December 2004.

[2] E. J. Garcia and J. J. Sniegowski, "Surface Micromachined Microengine," Sensors and Actuators A, Vol. 48 (1995) 203-214.

[3] Baker, Michael S. "Design and Reliability of a MEMS Thermal Rotary Actuator," TEXMEMS IX, Texas Tech University, Lubbock TX, September 17, 2007.

[4] Tanner, ., Owen, ., Jr., and Rodriguez, F., 2003, "Resonant Frequency Method for Monitoring MEMS Fabrication," Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4980, pp. 220-228.

More Literature on MEMS Actuators ...

. Comtois, . Bright, . Phipps, "Thermal microactuators for surface-micromachining processes", Proc. SPIE 2642 (1995) 10–21.

L. Que, J.-S. Park, . Gianchandani, "Bent-beam electro-thermal actuators for high force applications", Proceedings of the IEEE Micro Electro Mechanical Systems, 1999, pp. 31–36.

R. Cragun, . Howell, "Linear thermomechanical microactuators", Proceedings of the IMECE, ASME International Mechanical Engineering Congress & Exposition, November, 1999, pp. 181–188.

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